One platform, multiple configurations.
Beneq Transform® establishes a completely new class of ALD cluster tool products in it’s versatility and adaptability to address a broad range of applications and market segments. Beneq Transform® configure with multiple ALD process modules to meet a specific wafer capacity requirement or be later upgraded in response to growing volumes or with new ALD applications.
Single wafer or batch processing. Widest range of high-performance oxides and nitrides. Maximize your options for flexible volume production. With its flexible automation platform and unique capability to combine both thermal batch and plasma enhanced ALD process modules in one integrated system, Beneq Transform® offers unparalleled flexibility in how processing sequences can be realized to meet the most demanding thin-film deposition requirements.
Industry-standard horizontal wafer loading offers plug-and-play integration. A unique preheating module eliminates waiting time and boosts throughput to a whole new level.
Fully compliant with SEMI S2/S8 and SECS/GEM standards. Customized support ensures a smooth transition to ALD in production.
Technical Specifications :
| Product | Transform® |
| Dimensions | 3000 x 3000 x 2250 mm |
| Max Batch Load | 200 mm x 25 wafers |
| VCE Loadlocks | 2 |
| Integration | Cluster, up to 3 ALD modules & 1 pre-heater |
| Ozone Process Capability | Optional |
| Wafer Pre-Heating | Yes |
| Wafer Cooling | Built-in |
| Temperature Range | 25 – 420 ℃ |
| Plasma Gas Lines | 2 + 2 optional |
| Transfer Module Type | Mx600 |
| Wafer Throughput (Al2O3 @ 200 C, 50 nm) | 40 wafers/hour – 3 PM |
| Wafer Throughput (HfO2 @ 250 C, 20 nm) | 28 wafers/hour – 3 PM |
| Integration | SECS/GEM |
| Safety and Ergonomics | SEMI S2 and S8 |
