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Beneq Arradiance

TFS 200

It is the most flexible ALD research platform ever designed for research and development. 

Features: Down to 100 nm particle coating in fluidized bed reactor option, Hot source versatility, etc.

Applications: Thin film coatings, gate oxide, Transition metal nitrides, DRAM capacitor, Photo voltaic, Nano  material, Barrier layer coatings, Transistor capsuling, etc.


Details & Specifications

Other related products

TFS 200R, TFS 500, TFS 600, TFS 1200